Title :
Photoacoustic effect in laser annealing
Author_Institution :
Electrotechnical Laboratory, Tsukuba, Japan
Abstract :
The acoustic wave generated in silicon crystal during laser annealing has been observed. The acoustic signal increases superlinearly with incident laser energy beyond the melting threshold. This can be used for monitoring the state of melting during the annealing.
Keywords :
elemental semiconductors; laser beam annealing; melting; photoacoustic effect; silicon; Si crystals; elemental semiconductor; laser annealing; photoacoustic effect;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19800664
