Bringing the nanolaboratory inside electron microscopes

A nanolaboratory is one of the systems to realize various nanoscale fabrications and assemblies to develop novel nanodevices to integrate borderless technologies based on a nanorobotic manipulation system. We have presented the nanolaboratory inside electron microscopes including a transmission electron microscope (TEM), scanning electron microscope (SEM), and environmental-SEM (E-SEM) for three-dimensional (3D) and real-time nanomanipulation, nanoinstrumentation, and nanoassembly. The following is a presentation of our current work of nanomanipulation and nanoassembly based on the hybrid nanorobotic manipulation inside a TEM and an SEM toward carbon nanotube (CNT) applications. Single cell stiffness measurement has been also presented based on the nanorobotic manipulation system inside an E-SEM.