• DocumentCode
    968722
  • Title

    A Comparison of the Strength of Alumina Substrates for Different Separation Techniques

  • Author

    Schroeder, D.H. ; English, F.L.

  • Author_Institution
    Sandia Laboratories, Albuquerque, N. Mex.
  • Volume
    8
  • Issue
    3
  • fYear
    1972
  • fDate
    9/1/1972 12:00:00 AM
  • Firstpage
    4
  • Lastpage
    6
  • Abstract
    Carbon dioxide lasers arc widely used to separate alumina sheet into individual substrates for hybrid microcircuits. Laser separation offers several advantages over other conventional techniques; however, the effects on the flexural strength of the alumina have not previously been investigated. The flexural strength of alumina substratas separated by CO2, Q-switched YAG, and pulsed YAG lasers and diamond sewing are compared. The Q-switched YAG laser technique produced substrates 45 percent stronger than the CO2and pulsed YAG laser techniques, and 13 percent stronger than the diamond saw method.
  • Keywords
    Ceramics; Hybrid integrated circuits; Laser beam cutting; Laser beams; Laser modes; Laser theory; Optical pulses; Power lasers; Sawing; Thermal resistance;
  • fLanguage
    English
  • Journal_Title
    Parts, Hybrids, and Packaging, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0361-1000
  • Type

    jour

  • DOI
    10.1109/TPHP.1972.1136574
  • Filename
    1136574
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=968722