DocumentCode

968742

Title

Determination of the Relative Nitrogen Doping Level of Tantalum Nitride Resistor Film by Means of the Seebeck Effect

Author

Trudel, M.L.

Author_Institution

Bell Telephone Laboratories, Inc., Allentown, Pa.

Volume

8

Issue

3

fYear

1972

fDate

9/1/1972 12:00:00 AM

Firstpage

16

Lastpage

21

Keywords

Aging; Conductivity; Doping; Instruments; Nitrogen; Optical films; Resistors; Sputtering; Thermoelectricity; X-ray diffraction;

fLanguage

English

Journal_Title

Parts, Hybrids, and Packaging, IEEE Transactions on

Publisher

ieee

ISSN

0361-1000

Type

jour

DOI

10.1109/TPHP.1972.1136576

Filename

1136576