Title :
A Survey of Semiconductor Materials Technology
Author_Institution :
Semiconductor Div,California.
fDate :
6/1/1961 12:00:00 AM
Abstract :
A survey of the techniques used in the preparation and evaluation of semiconductor materials is presented. The various processes for the preparation and growth of crystals are described, and an outline of their relative merits is given. Crystalgrowth records must be maintained to permit control of yield from subsequent manufacturing processes.
Keywords :
Boats; Crystals; Furnaces; Germanium; Manufacturing processes; Production; Semiconductor device manufacture; Semiconductor devices; Semiconductor materials; Silicon;
Journal_Title :
Component Parts, IRE Transactions on
DOI :
10.1109/TCP.1961.1136595
