DocumentCode :
969051
Title :
Advanced submicron research and technology development at the national submicron facility
Author :
Wolf, E.D. ; Adesida, I. ; Ballantyne, J.M. ; Buhrman, R.A. ; Chinn, J.D. ; Eastman, L.F. ; Everhart, T. ; Frey, Jesse ; Hanson, G.R. ; Isaacson, M.S. ; Krusius, J.P. ; Sonek, G.J. ; Wicks, G.W. ; Wood, C.E.C.
Volume :
71
Issue :
5
fYear :
1983
fDate :
5/1/1983 12:00:00 AM
Firstpage :
589
Lastpage :
600
Keywords :
Construction industry; Electronics industry; Electrons; Fabrication; Government; Industrial electronics; Laboratories; Microstructure; Physics; Solid state circuits;
fLanguage :
English
Journal_Title :
Proceedings of the IEEE
Publisher :
ieee
ISSN :
0018-9219
Type :
jour
DOI :
10.1109/PROC.1983.12643
Filename :
1456911
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=969051
