The relationship of T
cto film composition, lattice parameter, ordering, and mechanical deformation in Nb
3Ge has been investigated. Particular attention has been focused on annealing effects in these films, both those occurring during the deposition as well as post-fabrication effects. We find that inadequate time or temperature of annealing during or after deposition does not allow the maximum possible T
cfor a given composition to be obtained, while excessive annealing induces the precipitation of second phase Nb
5Ge
3with a concomitant decrease in T
c. The presence of second phase material accelerates the decrease of T
cwith annealing. Four-point bending measurements show T
c\´s of the films deposited on Al
2O
3substrates are unchanged up to strains

. The breaking strain of these Al5-ceramic composites increases upon addition of a Au layer to the composite.