DocumentCode :
969845
Title :
Screen Printing Grade Polyimide Paste for Alpha-Particle Protection
Author :
Yamaguchi, Katsuhikp ; Igarashi, Kazumasa ; Tabata, Haruo ; Suzuki, Hideto
Author_Institution :
Nitto Kameyama Plant, Japan
Volume :
9
Issue :
4
fYear :
1986
fDate :
12/1/1986 12:00:00 AM
Firstpage :
370
Lastpage :
373
Abstract :
Polyimide coatings are becoming an important means of providing large-scale memory devices with protection against alpha-particle induced soft error. Efforts to develop a cost-effective method of application have led to the introduction of screen-printable polyimide materials. Conventional polyimide formulations are not suitable for screen printing because their filler particles fire larger than 4 um, which results in more than one pinhole per square centimeter. In addition, the N-methyl-pyrrolidone (NMP) solvent in the formulations breaks down silicone applicators and polyvinyl alcohol (PVA) screen emulsion and evaporates so fast that pot life of the formulations is limited to 2 h. Research has led to the development of new manufacturing techniques to produce smaller sized filler particles to eliminate pinholes as well as a new solvent system that extends the useful pot life of the material.
Keywords :
Alpha-particle radiation effects; Coatings; Integrated circuit fabrication; Integrated circuit reliability; Semiconductor memories; Applicators; Chemical processes; Chemical products; Manufacturing; Polyimides; Powders; Printing; Protection; Solvents; Viscosity;
fLanguage :
English
Journal_Title :
Components, Hybrids, and Manufacturing Technology, IEEE Transactions on
Publisher :
ieee
ISSN :
0148-6411
Type :
jour
DOI :
10.1109/TCHMT.1986.1136685
Filename :
1136685
Link To Document :
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