Title :
High-Frequency-Discharge Trimming of RuO2-Based Thick-Film Resistors-Part I: Affecting Factors
Author :
Taketa, Yoshiaki ; Haradome, Miyoshi
Author_Institution :
Nihon Univ., Japan
fDate :
6/1/1973 12:00:00 AM
Abstract :
The phenomena of high-frequency-discharge trimming of RuO2-basad glaze resistors was investigated as a function of the following: 1) the sintering condition of thick-film resistors, 2) the relation between the amount of additives to resistors and the rate of increase or decrease of resistance, 3) the effect of heat treatment before and after the trimming and effect of glass overcoating, 4) the influence of the trimming on neighboring resistors, and 5) the stability of resistors after the trimming. It has been found that the rate of change of resistance by this trimming is affected by fabrication conditions of the resistor, that its influence on nearby resistance is small, and that the stability of resistors after the trimming is satisfactory.
Keywords :
Hybrid integrated circuits; Thick-film resistors; Additives; Chemicals; Fabrication; Glass; Glazes; Heat treatment; Probes; Resistors; Shape; Stability;
Journal_Title :
Parts, Hybrids, and Packaging, IEEE Transactions on
DOI :
10.1109/TPHP.1973.1136713