DocumentCode
970333
Title
Transmission cathodoluminescence as a screening technique for rake lines in (Al,Ga)As DH laser material
Author
Gaw, C.A. ; Reynolds, C.L.
Author_Institution
Bell Laboratories, Reading, USA
Volume
17
Issue
8
fYear
1981
Firstpage
285
Lastpage
286
Abstract
The use of transmission cathodoluminescence (TCL) as a nondestructive screening technique for rake lines in (Al, Ga)As double heterostructure laser material is reported here for the first time. TCL evaluation is shown to correlate well with the fraction of good devices for both broad area and stripe geometry laser configurations.
Keywords
III-V semiconductors; aluminium compounds; cathodoluminescence; gallium arsenide; luminescence of inorganic solids; p-n heterojunctions; scanning electron microscope examination of materials; semiconductor junction lasers; (Al, Ga)As DH laser material; III-V semiconductor; rake lines; screening technique; transmission cathodoluminescence;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19810200
Filename
4245667
Link To Document