Title :
Transmission cathodoluminescence as a screening technique for rake lines in (Al,Ga)As DH laser material
Author :
Gaw, C.A. ; Reynolds, C.L.
Author_Institution :
Bell Laboratories, Reading, USA
Abstract :
The use of transmission cathodoluminescence (TCL) as a nondestructive screening technique for rake lines in (Al, Ga)As double heterostructure laser material is reported here for the first time. TCL evaluation is shown to correlate well with the fraction of good devices for both broad area and stripe geometry laser configurations.
Keywords :
III-V semiconductors; aluminium compounds; cathodoluminescence; gallium arsenide; luminescence of inorganic solids; p-n heterojunctions; scanning electron microscope examination of materials; semiconductor junction lasers; (Al, Ga)As DH laser material; III-V semiconductor; rake lines; screening technique; transmission cathodoluminescence;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19810200