DocumentCode
970452
Title
Laser writing of submicrometre lines on copper island films
Author
Baba, Ken-ichi ; Hayashi, K. ; Miyagi, Masaya
Author_Institution
Dept. of Electr. Commun., Tohoku Univ., Sendai, Japan
Volume
29
Issue
22
fYear
1993
Firstpage
1948
Lastpage
1949
Abstract
Laser writing on copper island films is demonstrated for the first time. Very fine lines with widths of less than 1 mu m have been written using a commercially available 0.82 mu m 20mW laser diode. The reflectance of the 8nm-thick copper island film is 49% at a wavelength of 0.82 mu m and it has been reduced to 15% by the irradiation of the focused laser beam due to the oxidation of copper islands. The Cu island film is considered as a new medium for an efficient heat-mode write-once memory.
Keywords
copper; discontinuous metallic thin films; laser beam applications; optical storage; oxidation; reflectivity; 0.82 micron; 1 micron; 20 mW; 8 nm; Cu; Cu island films; efficient heat-mode write-once memory; focused laser beam; irradiation; laser diode; laser writing; oxidation; reflectance; submicrometre lines; very fine lines;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19931297
Filename
244602
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