Title :
Laser writing of submicrometre lines on copper island films
Author :
Baba, Ken-ichi ; Hayashi, K. ; Miyagi, Masaya
Author_Institution :
Dept. of Electr. Commun., Tohoku Univ., Sendai, Japan
Abstract :
Laser writing on copper island films is demonstrated for the first time. Very fine lines with widths of less than 1 mu m have been written using a commercially available 0.82 mu m 20mW laser diode. The reflectance of the 8nm-thick copper island film is 49% at a wavelength of 0.82 mu m and it has been reduced to 15% by the irradiation of the focused laser beam due to the oxidation of copper islands. The Cu island film is considered as a new medium for an efficient heat-mode write-once memory.
Keywords :
copper; discontinuous metallic thin films; laser beam applications; optical storage; oxidation; reflectivity; 0.82 micron; 1 micron; 20 mW; 8 nm; Cu; Cu island films; efficient heat-mode write-once memory; focused laser beam; irradiation; laser diode; laser writing; oxidation; reflectance; submicrometre lines; very fine lines;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19931297