• DocumentCode
    970452
  • Title

    Laser writing of submicrometre lines on copper island films

  • Author

    Baba, Ken-ichi ; Hayashi, K. ; Miyagi, Masaya

  • Author_Institution
    Dept. of Electr. Commun., Tohoku Univ., Sendai, Japan
  • Volume
    29
  • Issue
    22
  • fYear
    1993
  • Firstpage
    1948
  • Lastpage
    1949
  • Abstract
    Laser writing on copper island films is demonstrated for the first time. Very fine lines with widths of less than 1 mu m have been written using a commercially available 0.82 mu m 20mW laser diode. The reflectance of the 8nm-thick copper island film is 49% at a wavelength of 0.82 mu m and it has been reduced to 15% by the irradiation of the focused laser beam due to the oxidation of copper islands. The Cu island film is considered as a new medium for an efficient heat-mode write-once memory.
  • Keywords
    copper; discontinuous metallic thin films; laser beam applications; optical storage; oxidation; reflectivity; 0.82 micron; 1 micron; 20 mW; 8 nm; Cu; Cu island films; efficient heat-mode write-once memory; focused laser beam; irradiation; laser diode; laser writing; oxidation; reflectance; submicrometre lines; very fine lines;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19931297
  • Filename
    244602