Title :
Acoustic properties of evaporated chalcogenide glass films
Author :
Kushibiki, J. ; Maehara, Hiroaki ; Chubachi, N.
Author_Institution :
Tohoku University, Department of Electrical Engineering, Faculty of Engineering, Sendai, Japan
Abstract :
Acoustic properties of characteristic acoustic impedance, longitudinal velocity and density for evaporated chalcogenide glass films of As-S, As2Se3 and As-S-Se systems are determined by reflection loss measurements in an acoustic transmission line composed of sapphire/chalcogenide-glass-film/water system in the UHF range. It is found that, by appropriately selecting the As/S/Se composition ratio of the evaporation source, the characteristic acoustic impedance of the evaporated chalcogenide glass film can be controlled within a range of 5.53¿9.30×106 kg m¿2s¿1.
Keywords :
acoustic impedance; acoustic wave transmission; acoustic wave velocity; arsenic compounds; chalcogenide glasses; vacuum deposited coatings; As-S; As-S-Se; As2Se3; UHF; acoustic transmission line; acoustic wave transmission; amorphous semiconductors; characteristic acoustic impedance; density; evaporated chalcogenide glass film; longitudinal velocity; reflection loss measurements;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19810227
