Title :
Two-step etching method for fabrication of fibre probe for photon scanning tunneling microscope
Author :
Pangaribuan, T. ; Jiang, Siwei ; Ohtsu, M.
Author_Institution :
Sch. of Sci. & Eng., Tokyo Inst. of Technol., Yokohama, Japan
Abstract :
The authors propose a novel two-step etching method for fabricating a fibre probe, with good reproducibility, for a photon scanning tunnelling microscope. A fibre probe with a cladding diameter of 14 mu m and cone angle of 20 degrees was fabricated by adjusting the first-step etching time and the composition of the second-step etching solution.
Keywords :
etching; optical fibre fabrication; optical losses; optical microscopes; tunnelling; 14 mum; cladding diameter; cone angle; fibre fabrication; fibre probe; first-step etching time; good reproducibility; photon scanning tunneling microscope; two-step etching method;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19931317
