• DocumentCode
    970684
  • Title

    Two-step etching method for fabrication of fibre probe for photon scanning tunneling microscope

  • Author

    Pangaribuan, T. ; Jiang, Siwei ; Ohtsu, M.

  • Author_Institution
    Sch. of Sci. & Eng., Tokyo Inst. of Technol., Yokohama, Japan
  • Volume
    29
  • Issue
    22
  • fYear
    1993
  • Firstpage
    1978
  • Lastpage
    1979
  • Abstract
    The authors propose a novel two-step etching method for fabricating a fibre probe, with good reproducibility, for a photon scanning tunnelling microscope. A fibre probe with a cladding diameter of 14 mu m and cone angle of 20 degrees was fabricated by adjusting the first-step etching time and the composition of the second-step etching solution.
  • Keywords
    etching; optical fibre fabrication; optical losses; optical microscopes; tunnelling; 14 mum; cladding diameter; cone angle; fibre fabrication; fibre probe; first-step etching time; good reproducibility; photon scanning tunneling microscope; two-step etching method;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19931317
  • Filename
    244622
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=970684