DocumentCode
971284
Title
Focused-Ion-Beam Fabrication of Slots in Silicon Waveguides and Ring Resonators
Author
Schrauwen, Jonathan ; Van Lysebettens, Jeroen ; Claes, Tom ; De Vos, Katrien ; Bienstman, Peter ; Van Thourhout, Dries ; Baets, Roel
Author_Institution
Dept. of Inf. Technol., Ghent Univ.-IMEC, Ghent
Volume
20
Issue
23
fYear
2008
Firstpage
2004
Lastpage
2006
Abstract
We present the focused-ion-beam fabrication of slots in existing silicon waveguides and racetrack resonators. The etch process was conducted with iodine enhancement and an alumina hard mask. We demonstrate a propagation loss of 100 dB/cm for slot waveguides and a Q value of 850 for slot racetrack resonators with bend radius of 6 mum.
Keywords
alumina; elemental semiconductors; focused ion beam technology; integrated optics; masks; optical fabrication; optical losses; optical resonators; optical waveguides; silicon; slot lines; sputter etching; Q value; Si; alumina hard mask; etch process; focused-ion-beam fabrication; iodine enhancement; propagation loss; ring resonators; silicon waveguides; slot racetrack resonators; slot waveguides; Focused ion beam; resonator; silicon; slot waveguide;
fLanguage
English
Journal_Title
Photonics Technology Letters, IEEE
Publisher
ieee
ISSN
1041-1135
Type
jour
DOI
10.1109/LPT.2008.2006001
Filename
4663548
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