• DocumentCode
    971566
  • Title

    Extremely low-noise MESFETs fabricated by metal-organic chemical vapour deposition

  • Author

    Kamei, Kentaro ; Kawasaki, Hiroshi ; Chigira, T. ; Nakanisi, T. ; Kawabuchi, K. ; Yoshimi, Masato

  • Author_Institution
    Toshiba Corporation, Electronics Equipment Division, Kawasaki, Japan
  • Volume
    17
  • Issue
    13
  • fYear
    1981
  • Firstpage
    450
  • Lastpage
    451
  • Abstract
    Quarter-micron gate low-noise GaAs MESFETs have been developed by delineating gate electrodes by an electron-beam lithography technique and by using high-purity epiwafers prepared by a metal-organic-chemical vapour deposition (MOCVD) technique. At 18 GHz, a noise figure of 1.75 dB with an associated gain of 8.5 dB and a maximum available gain of 11 dB were obtained at drain currents of 10 mA and 30 mA, respectively. This is the lowest noise figure yet reported for low-noise GaAs MESFETs.
  • Keywords
    III-V semiconductors; Schottky gate field effect transistors; electron beam lithography; gallium arsenide; vapour phase epitaxial growth; GaAs; MESFET; electron-beam lithography; epiwafers; low noise; metal-organic-chemical vapour deposition;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19810315
  • Filename
    4245787