DocumentCode
973059
Title
Surface-acoustic-wave (SAW) voltage sensor with improved sensitivity
Author
Joshi, Shrinivas G.
Author_Institution
Marquette University, Milwaukee, WI, USA
Volume
72
Issue
10
fYear
1984
Firstpage
1418
Lastpage
1419
Abstract
The sensitivity of a surface-acoustic-wave (SAW) voltage sensor can be increased by reducing the thickness of the substrate across which the voltage is applied. Voltage sensitivity of 95 Hz/V has been obtained in a 77-MHz SAW oscillator fabricated on a 71-µm-thick, 728° Y-X LiNbO3 substrate.
Keywords
Acoustic sensors; Delay effects; Delay lines; Dielectric substrates; Electrical resistance measurement; Frequency; Surface acoustic waves; Transducers; Voltage; Voltage-controlled oscillators;
fLanguage
English
Journal_Title
Proceedings of the IEEE
Publisher
ieee
ISSN
0018-9219
Type
jour
DOI
10.1109/PROC.1984.13029
Filename
1457297
Link To Document