Title :
Surface-acoustic-wave (SAW) voltage sensor with improved sensitivity
Author :
Joshi, Shrinivas G.
Author_Institution :
Marquette University, Milwaukee, WI, USA
Abstract :
The sensitivity of a surface-acoustic-wave (SAW) voltage sensor can be increased by reducing the thickness of the substrate across which the voltage is applied. Voltage sensitivity of 95 Hz/V has been obtained in a 77-MHz SAW oscillator fabricated on a 71-µm-thick, 728° Y-X LiNbO3substrate.
Keywords :
Acoustic sensors; Delay effects; Delay lines; Dielectric substrates; Electrical resistance measurement; Frequency; Surface acoustic waves; Transducers; Voltage; Voltage-controlled oscillators;
Journal_Title :
Proceedings of the IEEE
DOI :
10.1109/PROC.1984.13029
