• DocumentCode
    973059
  • Title

    Surface-acoustic-wave (SAW) voltage sensor with improved sensitivity

  • Author

    Joshi, Shrinivas G.

  • Author_Institution
    Marquette University, Milwaukee, WI, USA
  • Volume
    72
  • Issue
    10
  • fYear
    1984
  • Firstpage
    1418
  • Lastpage
    1419
  • Abstract
    The sensitivity of a surface-acoustic-wave (SAW) voltage sensor can be increased by reducing the thickness of the substrate across which the voltage is applied. Voltage sensitivity of 95 Hz/V has been obtained in a 77-MHz SAW oscillator fabricated on a 71-µm-thick, 728° Y-X LiNbO3substrate.
  • Keywords
    Acoustic sensors; Delay effects; Delay lines; Dielectric substrates; Electrical resistance measurement; Frequency; Surface acoustic waves; Transducers; Voltage; Voltage-controlled oscillators;
  • fLanguage
    English
  • Journal_Title
    Proceedings of the IEEE
  • Publisher
    ieee
  • ISSN
    0018-9219
  • Type

    jour

  • DOI
    10.1109/PROC.1984.13029
  • Filename
    1457297