• DocumentCode
    974461
  • Title

    Electron optical synthesis and optimization

  • Author

    Szilagyi, Mike N.

  • Author_Institution
    University of Arizona, Tucson, AZ, USA
  • Volume
    73
  • Issue
    3
  • fYear
    1985
  • fDate
    3/1/1985 12:00:00 AM
  • Firstpage
    412
  • Lastpage
    418
  • Abstract
    A novel approach to electron/ion optical synthesis and optimization is presented. Low-aberration field distributions are sought by dynamic programming or optimal control procedures in the form of continuous curves constructed of cubic splines. A very simple algorithm is proposed for the reconstruction of the electrodes or pole-pieces. High-quality electrostatic lens designs are shown as practical examples.
  • Keywords
    Electron beams; Electron optics; Electrostatics; Focusing; Ion beams; Lenses; Magnetic fields; Optical refraction; Optical sensors; Particle beam optics;
  • fLanguage
    English
  • Journal_Title
    Proceedings of the IEEE
  • Publisher
    ieee
  • ISSN
    0018-9219
  • Type

    jour

  • DOI
    10.1109/PROC.1985.13165
  • Filename
    1457433