DocumentCode
976796
Title
Simple backgated MOSFET structure for dynamic threshold control in fully depleted SOI CMOS
Author
Tarr, N.G. ; Soreefan, R. ; MacElwee, T.W. ; Snelgrove, W.M. ; Bazarjani, S.
Author_Institution
Dept. of Electron., Carleton Univ., Ottawa, Ont., Canada
Volume
32
Issue
12
fYear
1996
fDate
6/6/1996 12:00:00 AM
Firstpage
1093
Lastpage
1095
Abstract
A simple junction-isolated backgate electrode, formed by boron implantation through the buried oxide, is shown to provide effective dynamic control of device thresholds in fully depleted SOI CMOS for ≃1 V power supply operation
Keywords
CMOS integrated circuits; MOSFET; integrated circuit technology; ion implantation; silicon-on-insulator; 1 V; B implantation; Si:B; backgated MOSFET structure; buried oxide; dynamic threshold control; fully depleted SOI CMOS; junction-isolated backgate electrode;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19960739
Filename
502872
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