Title :
Confocal Fabry¿Perot sensor
Author :
Jackson, D.A. ; Kersey, A.D. ; Corke, M.
Author_Institution :
University of Kent at Canterbury, Physics Laboratory, Canterbury, UK
Abstract :
The use of a spherical mirror Fabry¿Perot (confocal) interferometer as an optical displacement sensor is described. The device incorporates a simple electronic servo to maintain the interferometer at an operating point of maximum sensitivity. Applications as vibration and acceleration sensors are forseen, with sensitivities for sinusoidal accelerations of 10¿3 ¿g achievable at 10 Hz.
Keywords :
acceleration measurement; displacement measurement; light interferometers; nonelectric sensing devices; vibration measurement; 10 Hz; electronic servo; optical displacement sensor; sinusoidal accelerations; spherical mirror Fabry-Perot interferometer;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19820155
