Title :
Nonequilibrium EEDF in gas discharge plasmas
Author :
Godyak, Valery A.
Author_Institution :
Osram Sylvania, Res. & Dev., Beverly, MA
fDate :
6/1/2006 12:00:00 AM
Abstract :
Nonequilibrium effects associated with spatial and temporal nonlocality between electron energy distribution and electromagnetic field in gas discharge plasmas at low gas pressures are reviewed in this paper. Formation of nonequilibrium EEDF is discussed for capacitive and inductive radio-frequency discharges. The possibility of electron temperature control is considered for gas discharge plasmas at nonequilibrium condition
Keywords :
high-frequency discharges; plasma sources; plasma temperature; plasma thermodynamics; capacitive radiofrequency discharges; electromagnetic field; electron energy distribution; electron temperature control; gas discharge plasmas; gas pressures; inductive radiofrequency discharges; nonequilibrium effects; Discharges; Distribution functions; Electromagnetic fields; Electron beams; Ionization; Plasma accelerators; Plasma density; Plasma sheaths; Plasma temperature; Radio frequency; Electron energy distribution function (EEDF); electron kinetics; gas discharge; nonequilibrium;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2006.875847
