Title :
Monolithic integrated-optic position/displacement sensor using waveguide gratings and QW-DFB laser
Author :
Suhara, T. ; Taniguchi, T. ; Uemukai, M. ; Nishihara, H. ; Hirata, T. ; Iio, S. ; Suehiro, M.
Author_Institution :
Dept. of Electron., Osaka Univ., Japan
Abstract :
A monolithic fully-integrated interferometer position/displacement sensor is proposed. The device is implemented with waveguide grating components, a GRIN SCH SQW DFB laser and photodiodes. A prototype device of 6.5/spl times/2.0 mm/sup 2/ chip size and 0.4/spl times/0.4 mm/sup 2/ sensing beam aperture is fabricated, and the sensor operation of submicron resolution is demonstrated.<>
Keywords :
diffraction gratings; displacement measurement; distributed feedback lasers; gradient index optics; integrated optics; light interferometers; measurement by laser beam; optical sensors; optical waveguide components; photodiodes; position measurement; quantum well lasers; 0.4 mm; 2.0 mm; 6.5 mm; 855 nm; GRIN SCH SQW DFB laser; QW-DFB laser; chip size; displacement sensor; interferometer; monolithic integrated-optic position sensor; photodiodes; sensing beam aperture; sensor operation; submicron resolution; waveguide grating components; waveguide gratings; Bragg gratings; Diode lasers; Integrated optics; Lenses; Monolithic integrated circuits; Optical waveguide components; Optical waveguides; Photodiodes; Waveguide components; Waveguide lasers;
Journal_Title :
Photonics Technology Letters, IEEE
