DocumentCode :
977373
Title :
Using direct-tunneling mechanism to suppress hysteresis effect in floating-body partially depleted SOI devices
Author :
Chen, Shiao-Shien ; Huang-Lu, Shiang ; Tang, Tien-Hao
Author_Institution :
Device Eng. Dept., United Microelectron. Corp., Hsinchu, Taiwan
Volume :
25
Issue :
5
fYear :
2004
fDate :
5/1/2004 12:00:00 AM
Firstpage :
331
Lastpage :
333
Abstract :
Considering the direct-tunneling mechanism, the hysteresis effect in ultrathin gate-oxide floating-body partially depleted (PD) silicon-on-insulator (SOI) devices is investigated. For H-gate PD SOI, owing to the converse poly-gate beside the body terminal, the influence of the direct-tunneling mechanism on the floating-body potential can no longer be overlooked. Based on the measured results, for ultrathin gate-oxide H-gate PD SOI devices, the floating-body potential is dominated by the direct-tunneling mechanism and appears highly gate voltage-dependent. As compared to the amount of the accumulation tunneling charges, the variation between the generation and recombination processes that causes the hysteresis behavior can be ignored. Therefore, the hysteresis effect is suppressed.
Keywords :
hysteresis; silicon-on-insulator; tunnelling; H-gate PD SOI; accumulation tunneling charges; body terminal; converse polygate; direct tunneling mechanism; floating body potential; floating-body partially depleted SOI devices; gate voltage-dependent; hysteresis effect suppression; ultrathin gate-oxide; Delay; Electrons; Hysteresis; MOSFETs; Research and development; Semiconductor thin films; Silicon on insulator technology; Thin film circuits; Threshold voltage; Tunneling;
fLanguage :
English
Journal_Title :
Electron Device Letters, IEEE
Publisher :
ieee
ISSN :
0741-3106
Type :
jour
DOI :
10.1109/LED.2004.827284
Filename :
1295124
Link To Document :
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