Title :
Tunable laser diode using a nickel micromachined external mirror
Author :
Uenishi, Y. ; Honma, K. ; Nagaoka, S.
Author_Institution :
NTT Interdisciplinary Res. Labs., Tokyo, Japan
fDate :
6/20/1996 12:00:00 AM
Abstract :
A tunable laser diode has been made by using a nickel micro-external mirror which is actuated by an electrostatic comb-drive. The mirror was fabricated by nickel surface micromachining. Its displacement was ~10 μm with <2 nm accuracy. Wavelength tunability of ~20 nm can be obtained by controlling the external cavity
Keywords :
electrostatic devices; laser cavity resonators; laser mirrors; laser tuning; micromachining; semiconductor lasers; Ni; displacement; electrostatic comb-drive actuator; external cavity; micromachined external mirror; surface micromachining; tunable laser diode; wavelength tunability;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19960801
