Title :
Leaky SAW velocity on water/silicon boundary measured by acoustic line-focus beam
Author :
Kushibiki, J. ; Horii, K. ; Chubachi, N.
Author_Institution :
Tohoku University, Department of Electrical Engineering, Faculty of Engineering, Sendai, Japan
Abstract :
Propagation characteristics of leaky SAWs at the boundary of water/silicon are investigated by the nonscanning reflection acoustic microscope using a line-focus beam. Experiments are performed for typical crystalline planes of silicon such as (111), (110), (001) and slightly inclined (111). These results obtained by the line-focus beam are compared to the experimental results obtained by the conventional point-focus beam.
Keywords :
acoustic wave velocity; silicon; surface acoustic waves; water; acoustic line-focus beam; leaky SAW velocity; nonscanning reflection acoustic microscope; propagation characteristics; water/Si boundary;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19820497
