Distributed MEMS tunable matching network using minimal-contact RF-MEMS varactors

Author

Shen, Qin ; Barker, N. Scott

Author_Institution

Charles L. Brown Dept. of Electr. & Comput. Eng., Virginia Univ., Charlottesville, VA

Volume

54

Issue

6

fYear

2006

fDate

6/1/2006 12:00:00 AM

Firstpage

2646

Lastpage

2658

Abstract

This paper presents the design, fabrication, and measurement of a double-slug tunable matching network based on a distributed microelectromechanical-system (MEMS) transmission line. The tuner is implemented with a new minimal-contact RF-MEMS varactor that largely eliminates stiction while allowing the capacitance ratio to be set anywhere from 2 to 5. The measured performance of the tunable matching network demonstrates complete coverage of the Smith chart out to a maximum voltage standing-wave ratio of 12:1 from 10 to 30 GHz with excellent agreement between measurement and simulation results

Keywords

impedance matching; micromechanical devices; transmission lines; tuning; varactors; 10 to 30 GHz; RF-MEMS varactors; distributed MEMS transmission line; double-slug tunable matching network; Capacitance; Capacitors; Impedance; Micromechanical devices; Radio frequency; Radiofrequency microelectromechanical systems; Switches; Transmission line measurements; Tuners; Varactors; Distributed microelectromechanical-system (MEMS) transmission line (DMTL); RF-MEMS; tunable matching network;

fLanguage

English

Journal_Title

Microwave Theory and Techniques, IEEE Transactions on

Publisher

ieee

ISSN

0018-9480

Type

jour

DOI

10.1109/TMTT.2006.872943

Filename

1643600