Title :
Optimizing Pulsed OBIC Technique for ESD Defect Localization
Author :
Essely, Fabien ; Guitard, Nicolas ; Darracq, Frédéric ; Pouget, Vincent ; Bafleur, Marise ; Perdu, Philippe ; Touboul, André ; Lewis, Dean
Author_Institution :
STMicroelectron., Rousset
Abstract :
This paper presents a study of the well-known optical beam-induced current (OBIC) technique applied to electrostatic-discharge defect localization. The OBIC technique is improved by using a pulsed laser beam instead of a continuous one. Critical parameters of the experimentation are explored in this paper. We particularly discuss on the influence of the laser energy, the bias of the device under test and the spatial resolution of the technique.
Keywords :
OBIC; electrostatic discharge; integrated circuit testing; ESD defect localization; electrostatic-discharge defect localization; laser energy; optical beam-induced current technique; optimizing pulsed OBIC technique; pulsed laser beam; spatial resolution; Electrostatic discharge; Inverters; Laboratories; Laser beams; Optical beams; Optical pulses; Optical sensors; Spatial resolution; Stimulated emission; Testing; Electrostatic discharge (ESD) defect; influence of experimental parameter; not given; pulsed optical beam-induced current (OBIC);
Journal_Title :
Device and Materials Reliability, IEEE Transactions on
DOI :
10.1109/TDMR.2007.911381
