DocumentCode :
980569
Title :
Superconducting properties of reactively sputtered NbCN thin films
Author :
Francavilla, T.L. ; Wolf, S.A. ; Skelton, E.F. ; Francavilla, T. ; Wolf, Stefan ; Skelton, E.
Author_Institution :
Naval Research Laboratory, Washington, DC
Volume :
17
Issue :
1
fYear :
1981
fDate :
1/1/1981 12:00:00 AM
Firstpage :
569
Lastpage :
572
Abstract :
Niobium Carbonitride thin films have been prepared by rf reactive sputtering of niobium in ar argon, reactive-gas (RG) atmosphere where the RG is a mixture of cyanogen and nitrogen. Film composition ranged from Nb1 Cx N1-x ( 
) as determined by Auger analysis, the carbon content roughly tracking the cyanogen partial pressure. Composition and substrate temperature were systematically varied and the resultant films studied by measurements of x-ray structure, resistivity, superconducting transition temperature Tc , and critical magnetic fields. We have found systematic preferential orientation of the crystallites in these films depending upon substrate temperature ana RG to argon ratio. Increasing either quantity causes the crystallites to reorient from the
) as determined by Auger analysis, the carbon content roughly tracking the cyanogen partial pressure. Composition and substrate temperature were systematically varied and the resultant films studied by measurements of x-ray structure, resistivity, superconducting transition temperature TKeywords :
Sputtering; Superconducting materials; Argon; Magnetic field measurement; Magnetic films; Niobium; Roentgenium; Sputtering; Substrates; Superconducting films; Superconducting thin films; Superconducting transition temperature;
fLanguage :
English
Journal_Title :
Magnetics, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9464
Type :
jour
DOI :
10.1109/TMAG.1981.1061147
Filename :
1061147
Link To Document :
