• DocumentCode
    980670
  • Title

    Current transport mechanisms in atomically abrupt metal-semiconductor interfaces

  • Author

    Shenai, Krishna ; Dutton, Robert W.

  • Author_Institution
    Integrated Circuits Lab., Stanford Univ., CA, USA
  • Volume
    35
  • Issue
    4
  • fYear
    1988
  • fDate
    4/1/1988 12:00:00 AM
  • Firstpage
    468
  • Lastpage
    482
  • Abstract
    A comprehensive model for electron transport mechanisms across a fully formed Schottky-barrier junction is proposed in which the metal-semiconductor interface is approximated as an abrupt quantum mechanical transition. Improved formulations of the barrier-lowering mechanisms and carrier tunneling effects are derived where the dipole barrier lowering is modeled as a single exponential decay of the total surface charge density. Quantum calculations follow a two-band model in which the imaginary component of the electron wave vector in the semiconductor energy gap is obtained by including the effect of both conduction and valence states. The energy band profile effects are included in the calculation of tunneling current, and it is shown that the finite negative charge residing at the metal-semiconductor interface considerably modulates the tunneling transmission probability of carriers. Experimental results obtained from atomically clean Al-n+ GaAs-nGaAs interfaces fabricated by in situ molecular-beam epitaxy (MBE) are shown to be in excellent agreement with the transport calculations
  • Keywords
    III-V semiconductors; Schottky effect; aluminium; gallium arsenide; molecular beam epitaxial growth; semiconductor device models; semiconductor-metal boundaries; Al-GaAs; Al-n+GaAs-nGaAs interfaces; MBE; Schottky-barrier junction; abrupt quantum mechanical transition; atomically abrupt metal-semiconductor interfaces; barrier-lowering mechanisms; calculation of tunneling current; carrier tunneling effects; current transport mechanism; dipole barrier lowering; electron transport mechanisms; electron wave vector; energy band profile effects; finite negative charge; molecular-beam epitaxy; semiconductor energy gap; semiconductors; single exponential decay; total surface charge density; tunneling transmission probability; two-band model; valence states; Atomic layer deposition; Electrons; Laboratories; Molecular beam epitaxial growth; Optical surface waves; Semiconductor materials; Semiconductor-metal interfaces; Temperature distribution; Tunneling; Vacuum systems;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/16.2481
  • Filename
    2481