Title :
Optical Y-junctions and S-bends formed by preferentially etched single-mode rib waveguides in InP
Author :
Buchmann, Peter ; Houghton, A.J.N.
Author_Institution :
British Telecom Research Laboratories, Ipswich, UK
Abstract :
Single-mode optical Y-junctions are demonstrated in epitaxial n¿/n+ InP. The rib waveguides with rectangular cross-section have been made using wet chemical etching in an HCI:H3PO4 preferential etchant. The minimum measured loss due to the branching point is approximately 1 dB for Y-junctions with a branching angle of 0.9° at the tip.
Keywords :
III-V semiconductors; etching; indium compounds; integrated optics; optical waveguides; HCL:H3PO4; InP; S-bends; branching point; optical Y-junctions; preferentially etched single-mode rib waveguides; wet chemical etching;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19820578
