DocumentCode :
980809
Title :
Simplified implementation of the windowing method for systematic and random yield calculation
Author :
De Vries, Dirk K. ; Volf, Paul A J
Author_Institution :
Crolles R&D, Philips Semicond., Crolles, France
Volume :
17
Issue :
2
fYear :
2004
fDate :
5/1/2004 12:00:00 AM
Firstpage :
188
Lastpage :
191
Abstract :
To separate systematic and random yield loss, common implementations of the windowing method use an unweighted fit of the Poisson model. By comparison to a properly weighted fit of the negative binomial model, we show that the unweighted fit of the Poisson model can give highly inaccurate results, especially in the presence of clustering. The unweighted fit of the Poisson model is shown to improve by reducing the number of points included, with the best results given by the very simplest form, which uses two points only.
Keywords :
CMOS integrated circuits; Poisson distribution; binomial distribution; integrated circuit yield; semiconductor process modelling; Poisson model; clustering; implementation; negative binomial model; random yield calculation; windowing method; yield loss; Manufacturing; Research and development; Semiconductor device modeling; Statistical distributions; Testing; Clustering; Poisson model; negative binomial model; random yield; systematic yield;
fLanguage :
English
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
Publisher :
ieee
ISSN :
0894-6507
Type :
jour
DOI :
10.1109/TSM.2004.826934
Filename :
1296722
Link To Document :
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