• DocumentCode
    980809
  • Title

    Simplified implementation of the windowing method for systematic and random yield calculation

  • Author

    De Vries, Dirk K. ; Volf, Paul A J

  • Author_Institution
    Crolles R&D, Philips Semicond., Crolles, France
  • Volume
    17
  • Issue
    2
  • fYear
    2004
  • fDate
    5/1/2004 12:00:00 AM
  • Firstpage
    188
  • Lastpage
    191
  • Abstract
    To separate systematic and random yield loss, common implementations of the windowing method use an unweighted fit of the Poisson model. By comparison to a properly weighted fit of the negative binomial model, we show that the unweighted fit of the Poisson model can give highly inaccurate results, especially in the presence of clustering. The unweighted fit of the Poisson model is shown to improve by reducing the number of points included, with the best results given by the very simplest form, which uses two points only.
  • Keywords
    CMOS integrated circuits; Poisson distribution; binomial distribution; integrated circuit yield; semiconductor process modelling; Poisson model; clustering; implementation; negative binomial model; random yield calculation; windowing method; yield loss; Manufacturing; Research and development; Semiconductor device modeling; Statistical distributions; Testing; Clustering; Poisson model; negative binomial model; random yield; systematic yield;
  • fLanguage
    English
  • Journal_Title
    Semiconductor Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2004.826934
  • Filename
    1296722