DocumentCode
980809
Title
Simplified implementation of the windowing method for systematic and random yield calculation
Author
De Vries, Dirk K. ; Volf, Paul A J
Author_Institution
Crolles R&D, Philips Semicond., Crolles, France
Volume
17
Issue
2
fYear
2004
fDate
5/1/2004 12:00:00 AM
Firstpage
188
Lastpage
191
Abstract
To separate systematic and random yield loss, common implementations of the windowing method use an unweighted fit of the Poisson model. By comparison to a properly weighted fit of the negative binomial model, we show that the unweighted fit of the Poisson model can give highly inaccurate results, especially in the presence of clustering. The unweighted fit of the Poisson model is shown to improve by reducing the number of points included, with the best results given by the very simplest form, which uses two points only.
Keywords
CMOS integrated circuits; Poisson distribution; binomial distribution; integrated circuit yield; semiconductor process modelling; Poisson model; clustering; implementation; negative binomial model; random yield calculation; windowing method; yield loss; Manufacturing; Research and development; Semiconductor device modeling; Statistical distributions; Testing; Clustering; Poisson model; negative binomial model; random yield; systematic yield;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2004.826934
Filename
1296722
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