Title :
Simplified implementation of the windowing method for systematic and random yield calculation
Author :
De Vries, Dirk K. ; Volf, Paul A J
Author_Institution :
Crolles R&D, Philips Semicond., Crolles, France
fDate :
5/1/2004 12:00:00 AM
Abstract :
To separate systematic and random yield loss, common implementations of the windowing method use an unweighted fit of the Poisson model. By comparison to a properly weighted fit of the negative binomial model, we show that the unweighted fit of the Poisson model can give highly inaccurate results, especially in the presence of clustering. The unweighted fit of the Poisson model is shown to improve by reducing the number of points included, with the best results given by the very simplest form, which uses two points only.
Keywords :
CMOS integrated circuits; Poisson distribution; binomial distribution; integrated circuit yield; semiconductor process modelling; Poisson model; clustering; implementation; negative binomial model; random yield calculation; windowing method; yield loss; Manufacturing; Research and development; Semiconductor device modeling; Statistical distributions; Testing; Clustering; Poisson model; negative binomial model; random yield; systematic yield;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2004.826934