• DocumentCode
    980985
  • Title

    Short-cavity GaAlAs laser by wet chemical etching

  • Author

    Bouadma, N. ; Riou, J. ; Bouley, J.C.

  • Author_Institution
    Centre National d´´Etudes des Télécommunications, Bagneux, France
  • Volume
    18
  • Issue
    20
  • fYear
    1982
  • Firstpage
    879
  • Lastpage
    880
  • Abstract
    A short-cavity (GaAl)As stripe geometry laser with a threshold current of 30 mA has been fabricated by a new chemical etch process which uses a multilayer metal mask. The laser is 23 ¿m long and 12 ¿m wide, and does not have reflective coatings on the etched facets. Quasi-single-mode operation is obtained in pulsed conditions.
  • Keywords
    III-V semiconductors; aluminium compounds; etching; gallium arsenide; semiconductor junction lasers; semiconductor technology; GaAlAs laser; chemical etch process; fabrication; multilayer metal mask; pulsed conditions; quasi-single-mode operation; semiconductor junction lasers; semiconductor technology; short-cavity (GaAl)As stripe geometry laser; threshold current; wet chemical etching;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19820596
  • Filename
    4246931