Title :
Nondestructive film thickness measurement on industrial diamond
Author_Institution :
Private Address, Los Angeles, USA
Abstract :
The surface-acoustic wave velocities on type IIA diamond, with and without a 1 ¿m-thick Au film, sputter deposited on one surface, were measured using an acoustic microscope at 50 MHz. From a computed SAW dispersion curve, the Aufilm thickness is inferred. There are high-frequency restrictions for this technique.
Keywords :
gold; metallic thin films; sputtered coatings; surface acoustic waves; thickness measurement; 50 MHz; Au-film thickness; SAW dispersion curve; acoustic microscope; sputter deposited; surface-acoustic wave velocities; type IIA diamond;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19820687
