• DocumentCode
    982350
  • Title

    Semiconductor surface studies with SAW-oscillator structures

  • Author

    Rademeyer, R. ; Davari, B. ; Das, P.

  • Author_Institution
    Rensselaer Polytechnic Institute, Electrical, Computer & Systems Engineering Department, Troy, USA
  • Volume
    18
  • Issue
    25
  • fYear
    1982
  • Firstpage
    1065
  • Lastpage
    1066
  • Abstract
    A new method is described whereby the surface charge against surface potential of an oxidised semiconductor sample can be obtained by measuring the frequency shift of a SAW delay-line oscillator. In this method a direct voltage is applied across the semiconductor with different configurations. The SAW delay line is made on LiNbO3 and is designed to oscillate (at 100 MHz) with a wideband amplifier in a feedback configuration.
  • Keywords
    delay lines; oscillators; surface acoustic wave devices; surface potential; 100 MHz; LiNbO3; SAW-oscillator structures; delay-line oscillator; feedback; frequency shift; semiconductor surface charge; surface potential; wideband amplifier;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19820729
  • Filename
    4247092