DocumentCode
982471
Title
Contact resistance of polysilicon silicon interconnections
Author
Reeves, Geoffrey K. ; Harrison, H.B.
Author_Institution
Telecom Australia Research Laboratories, Clayton, Australia
Volume
18
Issue
25
fYear
1982
Firstpage
1083
Lastpage
1085
Abstract
Electrical contacts to poly are an important part of current silicon technology. In this letter we present a method of calculating the electrical characteristics for a planar poly to silicon contact. An interesting and significant result that is derived and discussed is a minimum contact resistance that is a strong function not only of the specific contact resistance of the contact interface but also of the contact geometry.
Keywords
contact resistance; electrical contacts; elemental semiconductors; integrated circuit technology; large scale integration; silicon; VLSI; contact resistance; electrical contacts; integrated circuit technology; poly Si-Si interconnections;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19820741
Filename
4247107
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