Title :
Low-power thermo-optic tuning of vertically coupled microring resonators
Author :
Christiaens, I. ; Van Thourhout, D. ; Baets, R.
Author_Institution :
Dept. of Inf. Technol., Ghent Univ.Imec, Gent, Belgium
fDate :
4/29/2004 12:00:00 AM
Abstract :
InP/InGaAsP vertically coupled microring resonators fabricated with polymer (BCB) waferbonding are presented. Due to the low thermal conductivity of the polymer, thermo-optic tuning of the microring resonators is very efficient. A tuning range of 16 nm with a power input of 50 mW is demonstrated.
Keywords :
III-V semiconductors; gallium arsenide; indium compounds; low-power electronics; micromechanical resonators; optical tuning; polymers; thermal conductivity; wafer bonding; 50 mW; InP-InGaAsP; InP/InGaAsP resonator; low power thermo-optic tuning; low thermal conductivity; microring resonator fabrication; polymer waferbonding; vertically coupled resonators;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20040331
