• DocumentCode
    982550
  • Title

    High-efficiency GaAs power MESFETs prepared by ion implantation

  • Author

    Feng, Ming ; Kanber, H. ; Eu, V.K. ; Siracusa, M.

  • Author_Institution
    Hughes Aircraft Company, Torrance Research Center, Torrance, USA
  • Volume
    18
  • Issue
    25
  • fYear
    1982
  • Firstpage
    1097
  • Lastpage
    1099
  • Abstract
    GaAs power MESFETs have been fabricated using ion implantation to form channel layers. A 1 ¿m gate length by 2400 ¿m gate width device has demonstrated an output power of 1.63 W with 6.9 dB associated gain, 35% power-added efficiency and 9.7 dB linear gain at 10 GHz. The transconductance of this device is 280 mS, which corresponds to 117 mS/mm. This result demonstrates that excellent GaAs power MESFETs can be made by ion implantation, and is comparable to average results demonstrated by devices made by AsCl3 vapour phase epitaxy.
  • Keywords
    III-V semiconductors; Schottky gate field effect transistors; gallium arsenide; ion implantation; 10 GHz; GaAs power MESFETs; III-V semiconductor; channel layers; ion implantation; linear gain; power-added efficiency; transconductance;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19820749
  • Filename
    4247117