Micromachined piezoelectric force sensors based on PZT thin films

Author

Lee, Chengkuo ; Itoh, Toshihiro ; Suga, Tadatomo

Author_Institution

Res. Center for Adv. Sci. & Technol., Tokyo Univ., Japan

Volume

43

Issue

4

fYear

1996

fDate

7/1/1996 12:00:00 AM

Firstpage

553

Lastpage

559

Abstract

A micromachined lead zirconate titanate (PZT) force sensor for scanning force microscope (SFM) is conceptualized by its piezoelectricity. The fabrication procedure is interpreted, and mechanical characteristics of the micromachined PZT force sensors with various lengths are studied in this paper. A compact SFM is constructed by using the piezoelectric PZT sensor. A very clear image is taken by this SFM. The current study of the micromachined PZT force sensor can be considered as a breakthrough of design of SFM as well as a good example of integrated piezoelectric microdevices.

Keywords

atomic force microscopy; force measurement; lead compounds; piezoceramics; piezoelectric thin films; piezoelectric transducers; PZT; PZT thin films; PbZrO3TiO3; fabrication procedure; integrated piezoelectric microdevices; mechanical characteristics; piezoelectric force sensors; scanning force microscope; Atomic force microscopy; Fabrication; Force sensors; Mechanical sensors; Piezoelectric films; Piezoelectric materials; Sensor phenomena and characterization; Stress; Thin film sensors; Titanium compounds;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/58.503715

Filename

503715