DocumentCode
983163
Title
Erratum: Nondestructive film thickness measurement on industrial diamond
Author
Weglein, R.D.
Volume
19
Issue
2
fYear
1983
Firstpage
74
Keywords
gold; metallic thin films; sputtered coatings; surface acoustic waves; thickness measurement; 50 MHz; Au-film thickness; SAW dispersion curve; acoustic microscope; sputter deposited; surface-acoustic wave velocities; type IIA diamond;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19830054
Filename
4247227
Link To Document