Title :
A statistical model for integrated-circuit yield with clustered flaws
Author_Institution :
VTC Inc., Bloomington, MN, USA
fDate :
4/1/1988 12:00:00 AM
Abstract :
An explicit statistical model for die yield in integrated circuits (ICs) is developed. The model includes the effect of defect clustering, and is based on empirical observations of IC yield patterns. Using the simplest assumptions it leads to the well-known gamma-function yield formula
Keywords :
integrated circuit manufacture; integrated circuit technology; monolithic integrated circuits; statistical analysis; IC yield patterns; die yield; effect of defect clustering; empirical observations; gamma-function yield formula; integrated-circuit yield; monolithic ICs; statistical model; Costs; Elementary particles; Equations; Finite difference methods; Integrated circuit modeling; Monte Carlo methods; Semiconductor device modeling; Statistical distributions; Testing;
Journal_Title :
Electron Devices, IEEE Transactions on
