DocumentCode :
985699
Title :
Cr migration in CoNiTa/Cr films by annealing
Author :
Kawanabe, T. ; Hasegawa, K. ; Ono, S. ; Nakagawa, S. ; Naoe, M.
Author_Institution :
Dept. of Phys. Electron., Tokyo Inst. of Technol., Japan
Volume :
26
Issue :
1
fYear :
1990
fDate :
1/1/1990 12:00:00 AM
Firstpage :
42
Lastpage :
44
Abstract :
CoNiTa/Cr double-layered films for longitudinal magnetic recording media have been prepared by using the facing targets sputtering apparatus. Substrate heating and postannealing were performed in order to increase the coercive force Hc. While the as-deposited film at the substrate temperature Ts of 400°C had Hc of 780 Oe, the films deposited at Ts of room temperature, exposed to atmosphere, and annealed at 400°C, had Hc as high as 1700 Oe. It has been found that the same amount of Cr atoms migrated from the underlayer to the magnetic layer and the vicinity of the film surface. Consequently, such a large increase of Hc seemed to be caused by isolation of magnetic grains by Cr atoms in their boundaries
Keywords :
annealing; chemical interdiffusion; cobalt alloys; coercive force; ferromagnetic properties of substances; magnetic recording; magnetic surface phenomena; magnetic thin films; nickel alloys; sputtered coatings; tantalum alloys; CoNiTa-Cr; Cr migration; Cr underlayer; annealing; coercive force; double-layered films; facing targets sputtering; isolation of magnetic grains; longitudinal magnetic recording media; magnetic layer; magnetic thin films; postannealing; underlayer; Annealing; Atomic layer deposition; Chromium; Coercive force; Heating; Magnetic films; Magnetic recording; Sputtering; Substrates; Temperature;
fLanguage :
English
Journal_Title :
Magnetics, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9464
Type :
jour
DOI :
10.1109/20.50484
Filename :
50484
Link To Document :
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