Title :
Au-Mg improved ohmic contacts to p-GaAs
Author :
Papanicolaou, N.A. ; Christou, Alex
Author_Institution :
Naval Research Laboratory, Washington, USA
Abstract :
A novel ohmic contact alloy to p-GaAs consisting of 96 weight % Au and 4 weight % Mg, a Mo barrier metal and Au overlay is described. Contact resistivities as low as 8 × 10¿5 cm2 were achieved on heavily doped substrates. Auger sputter profiles have shown these contacts to be thermally stable up to 450°C.
Keywords :
III-V semiconductors; gallium arsenide; gold alloys; magnesium alloys; ohmic contacts; Au overlay; Au-Mg; Auger sputter profiles; III-V semiconductors; Mo barrier metal; contact resistivity; heavily doped substrates; ohmic contact alloy; p-GaAs; thermal stability;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19830287
