Title :
Vacuum arc discharges used to deposit hard wear resistant coatings onto tools
Author :
Gabriel, Herbert M.
Author_Institution :
PVT Plasma & Vakuum Technik GmbH, Weiterstadt, Germany
fDate :
10/1/1993 12:00:00 AM
Abstract :
The arc-ion-plating process used to deposit hard wear-resistant coatings onto tools is described in detail. Descriptions are provided of the basic arc deposition technology, the microdroplets and potential ways to eliminate them, and the arc evaporation sources and vacuum coating systems. The benefits of hard coatings for cutting tools are discussed
Keywords :
arcs (electric); ion plating; plasma deposition; vacuum deposition; arc deposition technology; arc evaporation sources; arc-ion-plating process; cutting tools; hard coatings; hard wear resistant coatings; microdroplets; tools; vacuum coating systems; Anodes; Arc discharges; Cathodes; Coatings; Plasma density; Plasma materials processing; Plasma sources; Plasma temperature; Vacuum arcs; Vacuum technology;
Journal_Title :
Plasma Science, IEEE Transactions on
