Title :
Multiwall carbon nanotube gas sensor fabricated using thermomechanical structure
Author :
Cho, Woo-Sung ; Moon, Seung-Il ; Lee, Yang-Doo ; Lee, Yun-Hi ; Park, Jung-Ho ; Ju, Byeong Kwon
Author_Institution :
Dept. of Electron. Eng., Korea Inst. of Sci. & Technol., Seoul, South Korea
fDate :
7/1/2005 12:00:00 AM
Abstract :
We address a multiwall carbon nanotube (MWCNT) gas sensor that has an enhanced reproducibility. The sensor consists of a heater, an insulating layer, a pair of contact electrodes, and an MWCNT-sensing film on a micromachined diaphragm. The heater plays a role in the temperature changes to modify the rates for desorption of gases on the sensing surface during sensor operation. Gas sensor responses of MWCNT-film to NO2 at room temperature are reported. We show that the sensor exhibits a reversible response with a time constant of a few minutes at thermal treatment temperature of 130°C.
Keywords :
carbon nanotubes; gas sensors; nanotube devices; nitrogen compounds; 130 C; NO2; contact electrodes; heater; insulating layer; micromachined diaphragm; multiwall carbon nanotube gas sensor fabrication; sensing film; thermomechanical structure; Carbon nanotubes; Electrodes; Gas detectors; Gases; Insulation; Reproducibility of results; Surface treatment; Temperature sensors; Thermal sensors; Thermomechanical processes; Gas sensor; multiwall carbon nanotube (MWCNT); nitrogen dioxide (NO; recovery;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2005.851095
