DocumentCode
986921
Title
Fabrication of SiO2-TiO2 glass planar optical waveguides by flame hydrolysis deposition
Author
Kawachi, M. ; Yasu, M. ; Edahiro, T.
Author_Institution
NTT Ibaraki Electrical Communication Laboratory, Tokai, Japan
Volume
19
Issue
15
fYear
1983
Firstpage
583
Lastpage
584
Abstract
Low-loss SiO2TiO2 planar waveguides of 0.1 dB/cm have been fabricated by flame hydrolysis deposition suitable for mass-production. A CO2 laser was used to make a stripe waveguide structure for loss measurements.
Keywords
flame sprayed coatings; integrated optics; optical glass; optical waveguides; optical workshop techniques; silicon compounds; titanium compounds; CO2 laser; SiO2-TiO2 planar waveguides; flame hydrolysis deposition; loss measurements; optical waveguides; stripe waveguide structure;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19830398
Filename
4247893
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