Title :
The proper use of electrostatic probes in electrodeless RF plasmas
Author :
Cantin, A. ; Gagne, R.
Author_Institution :
Canad. Armament R&D Establ., Quebec, Canada
fDate :
3/1/1968 12:00:00 AM
Abstract :
The dc characteristics of electrostatic probes can be modified considerably by the presence of an RF voltage across the junction between the probe and the plasma. Data are presented showing typical examples of such modification of double probe characteristics. It is shown how a correct probe characteristic can be obtained by proper design of the probe and measuring circuit.
Keywords :
Electrostatic devices; Plasmas; Probe antennas; Electric breakdown; Electrons; Electrostatics; Plasma applications; Plasma diagnostics; Plasma measurements; Plasma properties; Plasma sheaths; Probes; Radio frequency;
Journal_Title :
Antennas and Propagation, IEEE Transactions on
DOI :
10.1109/TAP.1968.1139158
