DocumentCode :
987256
Title :
Growth of Al0.3Ga0.7As by molecular beam epitaxy in the forbidden temperature range using As2
Author :
Erickson, L.P. ; Mattord, T.J. ; Palmberg, P.W. ; Fischer, Ray ; Morkoc, H.
Author_Institution :
Perkin-Elmer, Physical Electronics Division, Eden Praire, USA
Volume :
19
Issue :
16
fYear :
1983
Firstpage :
632
Lastpage :
633
Abstract :
Using a thermal cracker and polycrystalline arsenic source material, dimeric arsenic was obtained and utilised to grow Al0.3Ga0.7As layers in the temperature range of 600¿700°C with excellent surface morphologies. It has been previously found that, with tetrameric arsenic, excellent surface morphologies were possible only below 630°C and above 690°. Based on these observations, it is postulated that above 630°C tetrameric arsenic has a surface lifetime that is too short to provide enough coverage even when the beam flux is increased dramatically. At and above 700°C, tetrameric arsenic is cracked more effectively by the surface energy gained from the substrate leading to a good surface coverage and to good surface morphologies.
Keywords :
III-V semiconductors; aluminium compounds; gallium arsenide; molecular beam epitaxial growth; semiconductor epitaxial layers; semiconductor growth; 600 to 700degrees C; Al0.3Ga0.7As; As2; As4; III-V semiconductors; MBE; forbidden temperature range; molecular beam epitaxy; semiconductor epitaxial layers; semiconductor growth; surface energy; surface lifetime; surface morphologies; thermal cracker;
fLanguage :
English
Journal_Title :
Electronics Letters
Publisher :
iet
ISSN :
0013-5194
Type :
jour
DOI :
10.1049/el:19830431
Filename :
4247929
Link To Document :
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