• DocumentCode
    987256
  • Title

    Growth of Al0.3Ga0.7As by molecular beam epitaxy in the forbidden temperature range using As2

  • Author

    Erickson, L.P. ; Mattord, T.J. ; Palmberg, P.W. ; Fischer, Ray ; Morkoc, H.

  • Author_Institution
    Perkin-Elmer, Physical Electronics Division, Eden Praire, USA
  • Volume
    19
  • Issue
    16
  • fYear
    1983
  • Firstpage
    632
  • Lastpage
    633
  • Abstract
    Using a thermal cracker and polycrystalline arsenic source material, dimeric arsenic was obtained and utilised to grow Al0.3Ga0.7As layers in the temperature range of 600¿700°C with excellent surface morphologies. It has been previously found that, with tetrameric arsenic, excellent surface morphologies were possible only below 630°C and above 690°. Based on these observations, it is postulated that above 630°C tetrameric arsenic has a surface lifetime that is too short to provide enough coverage even when the beam flux is increased dramatically. At and above 700°C, tetrameric arsenic is cracked more effectively by the surface energy gained from the substrate leading to a good surface coverage and to good surface morphologies.
  • Keywords
    III-V semiconductors; aluminium compounds; gallium arsenide; molecular beam epitaxial growth; semiconductor epitaxial layers; semiconductor growth; 600 to 700degrees C; Al0.3Ga0.7As; As2; As4; III-V semiconductors; MBE; forbidden temperature range; molecular beam epitaxy; semiconductor epitaxial layers; semiconductor growth; surface energy; surface lifetime; surface morphologies; thermal cracker;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19830431
  • Filename
    4247929