Title :
Application of conformal mapping approximation techniques: parallel conductors of finite dimensions
Author :
Pesonen, Nadine ; Kahn, Walter K. ; Allen, Richard A. ; Cresswell, Michael W. ; Zaghloul, Mona E.
Author_Institution :
MEMS Sensors Group, Nat. Res. Center of Finland, Finland
fDate :
6/1/2004 12:00:00 AM
Abstract :
This paper describes a novel approach to the application of conformal mapping to capacitance evaluation. A particular structure composed of an array of identical lines and located below a conductive plate is studied. Results show the application of conformal mapping can reduce computing time when using three-dimensional electrostatic modeling and it can be the basis of algorithms of practical applications, especially in the semiconductor industry.
Keywords :
capacitance measurement; conductors (electric); conformal mapping; integrated circuit interconnections; capacitance evaluation; conductive plate; conformal mapping approximation techniques; finite dimensions; fringing effect; parallel conductors; three-dimensional electrostatic modeling; Capacitance; Capacitive sensors; Conductors; Conformal mapping; Electronics industry; Geometry; Lithography; NIST; Optical sensors; Silicon; Capacitance evaluation; conformal mapping; fringing effect;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
DOI :
10.1109/TIM.2004.827065
