Title :
On the prediction of geometry-dependent floating-body effect in SOI MOSFETs
Author :
Su, Pin ; Lee, Wei
Author_Institution :
Dept. of Electron. Eng., Nat. Chiao-Tung Univ., Hsinchu, Taiwan
fDate :
7/1/2005 12:00:00 AM
Abstract :
This brief demonstrates that, through the perspective of body-source built-in potential lowering (ΔVbi), the geometry-dependent floating-body effect in state-of-the-art silicon-on-insulator (SOI) MOSFETs can be explained and predicted by the geometry dependence of threshold voltage (VT). The correlation between ΔVbi and VT unveiled in this brief is the underlying mechanism responsible for the coexistence of partially depleted and fully depleted devices in a single SOI chip.
Keywords :
CMOS integrated circuits; MOSFET; buried layers; electric potential; semiconductor device models; silicon-on-insulator; SOI MOSFET; body-source built-in potential lowering; geometry-dependent floating-body effect prediction; silicon-on-insulator CMOS; single SOI chip; threshold voltage prediction; CMOS technology; Doping; Electrons; Geometry; MOSFETs; Poisson equations; Semiconductor device modeling; Semiconductor process modeling; Silicon on insulator technology; Threshold voltage; Body–source built-in potential lowering; floating-body effect; fully depleted (FD); partially depleted (PD); silicon-on-insulator (SOI) CMOS; threshold voltage;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/TED.2005.850626