• DocumentCode
    988343
  • Title

    On the Mean Free Path for Backscattering in k_{B}T Layer of Bulk Nano-MOSFETs

  • Author

    Chen, Ming-Jer ; Lu, Li-Fang ; Hsu, Chih-Yu

  • Author_Institution
    Dept. of Electron. Eng., Nat. Chiao Tung Univ., Hsinchu
  • Volume
    55
  • Issue
    12
  • fYear
    2008
  • Firstpage
    3594
  • Lastpage
    3598
  • Abstract
    We perform Monte Carlo particle simulations on a silicon conductor for the purposes of reexamining the channel backscattering in bulk nano-MOSFETs. The resulting mean free path lambdao for backscattering in a long and near-equilibrium conductor is constant, regardless of the potential profile. However, the apparent mean free path lambda1 in a local quasi-ballistic kBT layer depends on the curvature of the potential profile. In a linear potential profile, the lambda1 extracted in a wide range of the conductor length (15 to 100 nm) and lattice temperature (150 to 300 K) is found to fall below lambdao. The carrier heating as the origin of reduced mean free path is inferred from the simulated carrier velocity distribution near the injection point. Strikingly, the mean free paths in a parabolic potential profile remain consistent: lambda1 = lambdao. This indicates the absence or weakening of the carrier heating in the layer of interest, valid only for the parabolic potential barrier.
  • Keywords
    MOSFET; Monte Carlo methods; conductors (electric); elemental semiconductors; silicon; Monte Carlo particle simulations; Si; bulk nano-MOSFET; channel backscattering; size 15 nm to 100 nm; temperature 150 K to 300 K; Backscatter; Conductors; Heating; Helium; Lattices; MOSFET circuits; Monte Carlo methods; Semiconductor device manufacture; Silicon; Temperature distribution; Backscattering; MOSFET; nanoscale;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/TED.2008.2006532
  • Filename
    4674566