DocumentCode
988343
Title
On the Mean Free Path for Backscattering in
Layer of Bulk Nano-MOSFETs
Author
Chen, Ming-Jer ; Lu, Li-Fang ; Hsu, Chih-Yu
Author_Institution
Dept. of Electron. Eng., Nat. Chiao Tung Univ., Hsinchu
Volume
55
Issue
12
fYear
2008
Firstpage
3594
Lastpage
3598
Abstract
We perform Monte Carlo particle simulations on a silicon conductor for the purposes of reexamining the channel backscattering in bulk nano-MOSFETs. The resulting mean free path lambdao for backscattering in a long and near-equilibrium conductor is constant, regardless of the potential profile. However, the apparent mean free path lambda1 in a local quasi-ballistic kBT layer depends on the curvature of the potential profile. In a linear potential profile, the lambda1 extracted in a wide range of the conductor length (15 to 100 nm) and lattice temperature (150 to 300 K) is found to fall below lambdao. The carrier heating as the origin of reduced mean free path is inferred from the simulated carrier velocity distribution near the injection point. Strikingly, the mean free paths in a parabolic potential profile remain consistent: lambda1 = lambdao. This indicates the absence or weakening of the carrier heating in the layer of interest, valid only for the parabolic potential barrier.
Keywords
MOSFET; Monte Carlo methods; conductors (electric); elemental semiconductors; silicon; Monte Carlo particle simulations; Si; bulk nano-MOSFET; channel backscattering; size 15 nm to 100 nm; temperature 150 K to 300 K; Backscatter; Conductors; Heating; Helium; Lattices; MOSFET circuits; Monte Carlo methods; Semiconductor device manufacture; Silicon; Temperature distribution; Backscattering; MOSFET; nanoscale;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/TED.2008.2006532
Filename
4674566
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