A MEMS Singlet Oxygen Generator—Part II: Experimental Exploration of the Performance Space

This paper reports the quantitative experimental exploration of the performance space of a microfabricated singlet oxygen generator (muSOG). SOGs are multiphase reactors that mix H₂O₂, KOH, and Cl₂ to produce singlet delta oxygen, or O₂ (a). A scaled-down SOG is being developed as the pump source for a microfabricated chemical oxygen-iodine laser system because scaling down a SOG yields improved performance compared to the macroscaled versions. The performance of the muSOG was characterized using O₂ (a) yield, chlorine utilization, power in the flow, molar flow rate per unit of reactor volume, and steady-state operation as metrics. The performance of the muSOG is measured through a series of optical diagnostics and mass spectrometry. The test rig, which enables the monitoring of temperatures, pressures, and the molar flow rate of O₂ (a), is described in detail. Infrared spectra and mass spectrometry confirm the steady-state operation of the device. Experimental results reveal O₂ (a) concentrations in excess of 10¹⁷ cm^-3, O₂ (a) yield at the chip outlet approaching 80%, and molar flow rates of 02(a) per unit of reactor volume exceeding 600 times 10^-4 mol/L/s.